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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 7 February 2015)] MOEMS and Miniaturized Systems XIV - Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles
Piyawattanametha, Wibool, Park, Yong-Hwa, Walton, John P., Coutu, Ronald A., Starman, LaVernVolume:
9375
Year:
2015
Language:
english
DOI:
10.1117/12.2079390
File:
PDF, 743 KB
english, 2015