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SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - San Diego, California, United States (Sunday 8 March 2015)] Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2015 - Towards rhombohedral SiGe epitaxy on 150mm c-plane sapphire substrates
Varadan, Vijay K., Duzik, Adam J., Park, Yeonjoon, Choi, Sang H.Volume:
9434
Year:
2015
Language:
english
DOI:
10.1117/12.2085310
File:
PDF, 505 KB
english, 2015