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Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections
Liang, Jinxing, Li, Xuefeng, Li, Hongsheng, Ni, Yunfang, Li, Kunyu, Huang, Libin, Ueda, ToshitsuguVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.06GM06
Date:
June, 2011
File:
PDF, 744 KB
english, 2011