Deposition of Tungsten Thin Films on Flexible Polymer Substrates by Direct-Current Magnetron Sputtering
Zhang, Rui, Huo, Zhenxuan, Jiao, Xiangquan, Zhong, Hui, Shi, YuVolume:
44
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-015-3936-9
Date:
November, 2015
File:
PDF, 1.53 MB
english, 2015