SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Development of individually addressable micromirror arrays for space applications
Dutta, Sanghamitra B., Ewin, Audrey J., Jhabvala, Murzy D., Kotecki, Carl A., Kuhn, Jonathan L., Mott, David B., Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396508
File:
PDF, 1.41 MB
english, 2000