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Purified Silicon Film Formation from Metallurgical-Grade Silicon by Hydrogen-Plasma-Induced Chemical Transport
Ohmi, Hiromasa, Yamada, Takahiro, Kakiuchi, Hiroaki, Yasutake, KiyoshiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JD01
Date:
August, 2011
File:
PDF, 970 KB
english, 2011