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Combining 2 nm Spatial Resolution and 0.02% Precision for Deformation Mapping of Semiconductor Specimens in a Transmission Electron Microscope by Precession Electron Diffraction
Cooper, David, Bernier, Nicolas, Rouvière, Jean-LucLanguage:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.5b01614
Date:
July, 2015
File:
PDF, 3.27 MB
english, 2015