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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Advanced Cu barrier/seed development for 65nm technology beyond
Peijun Ding,, Gopalraja, P., Jianming Fu,, Jick Yu,, Zheng Xu,, Fusen Chen,Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/ICSICT.2004.1435053
File:
PDF, 814 KB
english, 2004