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SPIE Proceedings [SPIE SPIE Defense + Security - Baltimore, Maryland, United States (Monday 20 April 2015)] Micro- and Nanotechnology Sensors, Systems, and Applications VII - Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer
George, Thomas, Dutta, Achyut K., Islam, M. Saif, Shalimov, Andrew, Timoshenkov, Sergey, Korobova, Natalia, Golovinskiy, Maxim, Timoshenkov, Alexey, Zuev, Egor, Berezueva, Svetlana, Kosolapov, AndreyVolume:
9467
Year:
2015
Language:
english
DOI:
10.1117/12.2176815
File:
PDF, 736 KB
english, 2015