[ACM Press the 2005 ACM symposium - Cambridge, Massachusetts (2005.06.13-2005.06.15)] Proceedings of the 2005 ACM symposium on Solid and physical modeling - SPM '05 - Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes
Udeshi, TusharYear:
2005
Language:
english
DOI:
10.1145/1060244.1060273
File:
PDF, 682 KB
english, 2005