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Effect of Incident Translational Energy and Surface Temperature on the Sticking Probability of F2 and O2 on Si(100)-2.times.1 and Si(111)-7.times.7
Behringer, E. R., Flaum, H. C., Sullivan, D. J. D., Masson, D. P., Lanzendorf, E. J., Kummel, A. C.Volume:
99
Language:
english
Journal:
The Journal of Physical Chemistry
DOI:
10.1021/j100034a027
Date:
August, 1995
File:
PDF, 2.28 MB
english, 1995