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Thermal stability of methyl groups on silicon(100) generated by the decomposition of tetramethylgermane
Greenlief, C. Michael, Klug, Debra AnnVolume:
96
Language:
english
Journal:
The Journal of Physical Chemistry
DOI:
10.1021/j100192a045
Date:
June, 1992
File:
PDF, 762 KB
english, 1992