Ab Initio-Derived Dynamics for F 2...

Journal of Physical Chemistry 1996 / 01 Vol. 100; Iss. 2

Ab Initio-Derived Dynamics for F 2 Reactions with Partially Fluorinated Si(100) Surfaces:  Translational Activation as a Possible Etching Tool

Carter, Lawrence E., Carter, Emily A.
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Volume:
100
Language:
english
Journal:
The Journal of Physical Chemistry
DOI:
10.1021/jp952905i
Date:
January, 1996
File:
PDF, 1010 KB
english, 1996
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