SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Thursday 11 May 1995)] International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Roughness effects in the infrared reflectance of thick 3C-SiC films grown on Si substrates

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