SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - Investigation on total scattering at 157 nm and 193 nm
Kadkhoda, Puja, Welling, Herbert, Guenster, Stefan, Ristau, Detlev, Al-Jumaily, Ghanim A., Duparre, Angela, Singh, BhanwarVolume:
4099
Year:
2000
Language:
english
DOI:
10.1117/12.405837
File:
PDF, 936 KB
english, 2000