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Effects of Excimer Laser Annealing on InGaZnO 4 Thin-Film Transistors Having Different Active-Layer Thicknesses Compared with Those on Polycrystalline Silicon
Nakata, Mitsuru, Takechi, Kazushige, Yamaguchi, Shinya, Tokumitsu, Eisuke, Yamaguchi, Hirotaka, Kaneko, SetsuoVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.115505
Date:
November, 2009
File:
PDF, 230 KB
english, 2009