Single-mask fabrication of high-G piezoresistive...

Journal of Micromechanics and Microengineering 2007 / 04 Vol. 17; Iss. 4

Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range

Eklund, E Jesper, Shkel, Andrei M
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/4/009
Date:
April, 2007
File:
PDF, 424 KB
english, 2007
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