Bridging the length scales between lithographic patterning and self assembly mechanisms in fabrication of semiconductor nanostructure arrays
Hull, R, Floro, J A, Gherasimova, M, Graham, J F, Gray, J L, Portavoce, A, Ross, F M, Thorp, JVolume:
209
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/209/1/012003
Date:
February, 2010
File:
PDF, 1.59 MB
english, 2010