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SPIE Proceedings [SPIE Optics East 2006 - Boston, MA (Sunday 1 October 2006)] Optomechatronic Micro/Nano Devices and Components II - Low-temperature bonding of a LiNbO3 waveguide chip to a Si substrate in ambient air for hybrid-integrated optical devices
Takigawa, Ryo, Higurashi, Eiji, Suga, Tadatomo, Shinada, Satoshi, Kawanishi, Tetsuya, Katagiri, YoshitadaVolume:
6376
Year:
2006
Language:
english
DOI:
10.1117/12.690741
File:
PDF, 921 KB
english, 2006