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[ACM Press the 52nd Annual Design Automation Conference - San Francisco, California (2015.06.07-2015.06.11)] Proceedings of the 52nd Annual Design Automation Conference on - DAC '15 - EUV and e-beam manufacturability
Chang, Yao-Wen, Liu, Ru-Gun, Fang, Shao-YunYear:
2015
Language:
english
DOI:
10.1145/2744769.2747925
File:
PDF, 1.09 MB
english, 2015