Effects of Ambient and Dissolved Oxygen Concentration in Ultrapure Water on Initial Growth of Native Oxide on a Silicon (100) Surface
Li, Fuhe, Balazs, Marjorie K., Anderson, ScottVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1946487
File:
PDF, 316 KB
english, 2005