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A full description of a scalable microfabrication process for arrayed electrowetting microprisms
Hou, L, Zhang, J, Smith, N, Yang, J, Heikenfeld, JVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/1/015044
Date:
January, 2010
File:
PDF, 2.55 MB
english, 2010