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Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition
Sainiemi, Lauri, Viheriälä, Jukka, Sikanen, Tiina, Laukkanen, Janne, Niemi, TapioVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/7/077001
Date:
July, 2010
File:
PDF, 2.33 MB
english, 2010