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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, Ca (Sunday 25 January 2004)] Photon Processing in Microelectronics and Photonics III - Analysis of thermal damage in bulk silicon with femtosecond laser micromachining
Coyne, Edward, O'Connor, Gerard M., Mannion, Paul, Magee, Jonathan, Glynn, Thomas J., Herman, Peter R., Fieret, Jim, Pique, Alberto, Okada, Tatsuo, Bachmann, Friedrich G., Hoving, Willem, Washio, KuniVolume:
5339
Year:
2004
Language:
english
DOI:
10.1117/12.529218
File:
PDF, 1.81 MB
english, 2004