Dynamik von MEMS-Bausteinen berührungslos charakterisieren...

Dynamik von MEMS-Bausteinen berührungslos charakterisieren (Non-contact Characterization of MEMS Dynamics)

Dräbenstedt, Alexander, Heimes, Frank, Hettwer, Dirk, Rembe, Christian, Steger, Heinrich, Wörtge, Michael
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Volume:
72
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2005.72.11.601
Date:
January, 2005
File:
PDF, 523 KB
german, 2005
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