Simulation-based systematic error compensation for...

Measurement 2015 / 09 Vol. 73

Simulation-based systematic error compensation for nanoprofiler using normal vector tracing method

Kudo, Ryota, Okita, Kenya, Okuda, Kohei, Tokuta, Yusuke, Nakano, Motohiro, Yamamura, Kazuya, Endo, Katsuyoshi
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Volume:
73
Language:
english
Journal:
Measurement
DOI:
10.1016/j.measurement.2015.05.047
Date:
September, 2015
File:
PDF, 1.49 MB
english, 2015
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