Characterization and optimization of dry releasing for the...

Journal of Micromechanics and Microengineering 2007 / 10 Vol. 17; Iss. 10

Characterization and optimization of dry releasing for the fabrication of RF MEMS capacitive switches

Yu, A B, Liu, A Q, Oberhammer, J, Zhang, Q X, Hosseini, H M
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Volume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/014
Date:
October, 2007
File:
PDF, 698 KB
english, 2007
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