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Fast atomic force microscopy with self-transduced, self-sensing cantilever
Ahmad, Ahmad, Ivanov, Tzvetan, Angelov, Tihomir, Rangelow, Ivo W.Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.031209
Date:
July, 2015
File:
PDF, 4.68 MB
english, 2015