Robust friction compensation for submicrometer positioning and tracking for a ball-screw-driven slide system
Paul I. Ro, Wonbo Shim, Sanghwa JeongVolume:
24
Year:
2000
Language:
english
Pages:
14
DOI:
10.1016/s0141-6359(00)00030-1
File:
PDF, 537 KB
english, 2000