Zone-plate inteferometer to measure the positioning error of a cutting tool
Takashi Nomura, Kazuhide Kamiya, Hiroshi Miyashiro, Hatsuzo Tashiro, Kazuo YoshikawaVolume:
20
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0141-6359(97)81197-x
File:
PDF, 561 KB
english, 1997