Micro and nanofabrication of SiGe/Ge bridges and membranes...

Microelectronic Engineering 2015 / 06 Vol. 141

Micro and nanofabrication of SiGe/Ge bridges and membranes by wet-anisotropic etching

Mondiali, V., Lodari, M., Chrastina, D., Barget, M., Bonera, E., Bollani, M.
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Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.067
Date:
June, 2015
File:
PDF, 845 KB
english, 2015
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