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Investigation of residual stress in structured diamond films grown on silicon
Jirásek, Vít, Ižák, Tibor, Varga, Marián, Babchenko, Oleg, Kromka, AlexanderVolume:
589
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.07.022
Date:
August, 2015
File:
PDF, 1.64 MB
english, 2015