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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 6 March 2005)] Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Post-CMOS chip-level processing for high-aspect-ratio microprobe fabrication utilizing pulse plating
Xin, Tinghui, Ajmera, Pratul K., Zhang, Chuang, Srivastava, Ashok, Varadan, Vijay K.Volume:
5763
Year:
2005
Language:
english
DOI:
10.1117/12.600128
File:
PDF, 457 KB
english, 2005