Three-Dimensional Nanoimprint Mold Fabrication by...

Japanese Journal of Applied Physics 2003 / 6 Vol. 42; Iss. Part 1, No

Three-Dimensional Nanoimprint Mold Fabrication by Focused-Ion-Beam Chemical Vapor Deposition

Morita, Takahiko, Watanabe, Keiichiro, Kometani, Reo, Kanda, Kazuhiro, Haruyama, Yuichi, Kaito, Takashi, Fujita, Jun-ichi, Ishida, Masahiko, Ochiai, Yukinori, Tajima, Tsutomu, Matsui, Shinji
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.3874
Date:
June, 2003
File:
PDF, 215 KB
english, 2003
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