Characteristics of Nano-Electrostatic Actuator Fabricated...

Japanese Journal of Applied Physics 2004 / 10 Vol. 43; Iss. 10

Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition

Kometani, Reo, Hoshino, Takayuki, Kondo, Kazushige, Kanda, Kazuhiro, Haruyama, Yuichi, Kaito, Takashi, Fujita, Jun-ichi, Ishida, Masahiko, Ochiai, Yukinori, Matsui, Shinji
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.7187
Date:
October, 2004
File:
PDF, 278 KB
english, 2004
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