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Interpolymer complexes of poly(acrylic acid) and poly(ethylene glycol) for low dishing in STI CMP
Seo, Jihoon, Moon, Jinok, Moon, Sunho, Paik, UngyuVolume:
353
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.06.078
Date:
October, 2015
File:
PDF, 836 KB
english, 2015