Characterization of the polymerization of SU-8 photoresist...

Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS)

J. Zhang, K.L. Tan, H.Q. Gong
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Volume:
20
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0142-9418(01)00005-8
File:
PDF, 608 KB
english, 2001
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