![](/img/cover-not-exists.png)
Role of oxygen contaminant on the physical properties of sputtered AlN thin films
Signore, M.A., Taurino, A., Valerini, D., Rizzo, A., Farella, I., Catalano, M., Quaranta, F., Siciliano, P.Volume:
649
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2015.05.289
Date:
November, 2015
File:
PDF, 1.69 MB
english, 2015