Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3...

Journal of Crystal Growth 2015 / 08 Vol. 424

Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(AlxGa1−x)2O3 films

Wakabayashi, Ryo, Oshima, Takayoshi, Hattori, Mai, Sasaki, Kohei, Masui, Takekazu, Kuramata, Akito, Yamakoshi, Shigenobu, Yoshimatsu, Kohei, Ohtomo, Akira
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Volume:
424
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2015.05.005
Date:
August, 2015
File:
PDF, 523 KB
english, 2015
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