Formation of self-organized nano-surfaces on III–V semiconductors by low energy oxygen ion bombardment
Hernández, A.G., Kudriavtsev, Yu., Gallardo, S., Avendaño, M., Asomoza, R.Volume:
37
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.02.074
Date:
September, 2015
File:
PDF, 12.44 MB
english, 2015