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Differential 3ω method for measuring thermal conductivity of AlN and Si3N4 thin films
Bogner, Manuel, Hofer, Alexander, Benstetter, Günther, Gruber, Hermann, Fu, Richard Y.Q.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.03.031
Date:
March, 2015
File:
PDF, 600 KB
english, 2015