The impact of the nano-pore filling on the performance of...

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Thin Solid Films 2015 / 5

The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers

Perrotta, Alberto, Aresta, Gianfranco, van Beekum, Erik R.J., Palmans, Jurgen, van de Weijer, Peter, van de Sanden, M.C.M. Richard, Kessels, W.M.M. Erwin, Creatore, Mariadriana
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.05.026
Date:
May, 2015
File:
PDF, 621 KB
english, 2015
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