Spatial distribution study of argon radio-frequency inductively coupled plasma in inverse hysteresis transition area
Zhou, Lifen, Chen, Junfang, Ma, Junhui, Li, YeVolume:
119
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.05.031
Date:
September, 2015
File:
PDF, 475 KB
english, 2015