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Thin Gallium Oxide Film Deposited in Vacuum for In Situ Process Use
Ozasa, Kazunari, Ye, Tianchun, Aoyagi, YoshinobuVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L329
Date:
March, 1993
File:
PDF, 710 KB
1993