New Vapor Phase Growth Method of FeN Thin Films Using a...

Japanese Journal of Applied Physics 1999 / 10 Vol. 38; Iss. Part 1, No

New Vapor Phase Growth Method of FeN Thin Films Using a Chloride Source

Takahashi, Naoyuki, Toda, Yoshihiro, Nakamura, Takato, Fujii, Toshitaka
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.6031
Date:
October, 1999
File:
PDF, 212 KB
english, 1999
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