Thermal Lithography for 100-nm Dimensions Using a Nano-Heat...

Japanese Journal of Applied Physics 2002 / 9 Vol. 41; Iss. Part 2, No

Thermal Lithography for 100-nm Dimensions Using a Nano-Heat Spot of a Visible Laser Beam

Kuwahara, Masashi, Li, Jianming, Mihalcea, Christoph, Atoda, Nobufumi, Tominaga, Junji, Shi, Lu Ping
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L1022
Date:
September, 2002
File:
PDF, 77 KB
english, 2002
Conversion to is in progress
Conversion to is failed