![](/img/cover-not-exists.png)
Measurement of thickness of a thin film by means of laser interference at many incident angles
Kazuhiko Ishikawa, Hitomi Yamano, Ki-ichiro Kagawa, Katsuhiko Asada, Koichi Iwata, Masahiro UedaVolume:
41
Year:
2004
Language:
english
Pages:
11
DOI:
10.1016/s0143-8166(02)00146-x
File:
PDF, 494 KB
english, 2004