Effects of non-amorphizing hydrogen ion implantation on anisotropy in micro cutting of silicon
Xiao, G.B., To, S., Jelenković, E.V.Volume:
225
Language:
english
Journal:
Journal of Materials Processing Technology
DOI:
10.1016/j.jmatprotec.2015.06.017
Date:
November, 2015
File:
PDF, 5.23 MB
english, 2015