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Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper
Solano, Belen, Merrell, James, Gallant, Andrew, Wood, DavidVolume:
124
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.06.002
Date:
July, 2014
File:
PDF, 695 KB
english, 2014