Stacking of nanoscale metal dot array using liquid transfer...

Microelectronic Engineering 2015 / 06 Vol. 141

Stacking of nanoscale metal dot array using liquid transfer imprint lithography with roll press

Tsuji, Takahiro, Taniguchi, Jun
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Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.02.008
Date:
June, 2015
File:
PDF, 2.03 MB
english, 2015
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